An ultra-precision grinding machine tool (Moore Nanotech 450UPL) used in this research is equipped with high stiffness hydrostatic oil-bearing and high-resolution linear motor drives. It has a four-axis machining system including linear X and Z axes and rotational B and C axes, and the programming resolution can research up to 0.01 nm …

This chapter focuses on the purpose of using diamond as a cutting tool in various ultra-precision machining applications. The complicated structures such as resin and ceramic mold used for making optical lenses are machined by the diamond tool to improve the precision of the finished product. It is difficult to machine hard and brittle …

Ultra-precision fly cutting (UPFC) is a very flexible machining technology for micro-structures with intricated shapes [29,30]. Because of its unique cutting process, the ductile machining model for UPFC is totally different from that of diamond milling, diamond sculpturing and FTS/STS.

Tool-based micromachining includes micro turning, drilling, milling, grinding, etc., have many merits include user friendly, less investment cost, precision surface finish with geometrical accuracy, etc. However, challenges associated with processes are yet to be solved as the machining unit is reduced [ 2 ].

The proposed grinding model is to predict the total normal grinding force by calculating the normal force for each grit and by considering the elastic deformation of the machine tool and the PCD tool induced by the normal grinding force as shown in Fig. 2.The grinding force model consists of three steps: (1) modeling of the surface …

This Special Issue aims to publish original research and review articles in the field of "High-quality surface integrity in Ultra-precision Machining". Papers on new theories, techniques, and applications in the fields of precision engineering, microengineering, and nanotechnology are welcome. We also welcome scholars in related fields to ...

Introduction. With the rapid development of the design concept of high-end optical systems [1], [2], ultra-precision free-form optics with excellent reflection and imaging performance has been used in various advanced optical systems to simplify system structure, enhance optical performance, and achieve the functions that are difficult to be …

In this paper, the state of art of ultrasonic-assisted machining technologies used for fabrication of micro/nano-textured surfaces is reviewed. Diamond machining is the most widely used method in industry for manufacturing precision parts. For fabrication of fine structures on surfaces, conventional diamond machining methods are competitive …

Ultra-precision machining technology plays an increasingly important role in the future manufacturing field. The surface quality requirement of the machined parts becomes higher and higher, especially in some application fields such as the precision optics [].This high requirement is not only represented by the realization of ultra-low PV …

Ultra-precision grinding is an abrasive process, providing high surface quality but hardly up to that of ultra-precision diamond cutting. It is primarily adopted for machining difficult-to-cut materials with a grinding wheel of frequently-used diamond or cubic boron nitride grits [15].Ultra-precision polishing is also an abrasive process for …

Small-scale aspheric optical lenses are widely used in precision optics, biological engineering, photoelectric information, aerospace technology, and other fields, as shown in Fig. 1. Therefore, the ultra-precision machining of small-scale aspheric optical components has gradually become a research hotspot. The aspheric lens has multiple …

Machine tools are developed with the possibility of producing the micro geometry (cutting edge design) of micro tools as well as plating processes to produce …

Dear Colleagues, High-precision abrasive machining is an essential process for high-value manufacturing. It involves machines, processes and systems often reflected in high-performance grinding and/or abrasive machines, a complex abrasive cutting process, super-hard grinding wheels or ultra-thin abrasive blades, automated …

tools to enhance their machining performance[2-5]. Dynamic characteristics of miniaturized ultra-precision machine tools also need to be analyzed for structure

2.1 Ultra Precision and Micro Machining. Definitions for ultra precision machining and micro machining processes are provided by Mativenga [] and Brinksmeier [] in the CIRP Encyclopedia of Production Engineering.Mativenga [] defined micro machining as "(…) a manufacturing technology that involves the use of mechanical …

Diamond has many outstanding properties, such as high hardness, great toughness, high capability up to a nanometric tool cutting edge, high thermal conductivity, low friction, and high wear resistance. Accordingly, it is employed as an efficient tool in ultra-precision machining (UPM). However, diamond tool wear (DTW) in UPM is an …

1. Introduction. With the development of modern industry, surfaces with submicrometric form accuracy and nanometric surface roughness are widely used in optics [1, 2], machinery manufacturing, biomedicine [3], and national defence and the military [4].Corresponding ultra-precision machining technologies have also attracted attention …

Microgrinding. Chapter. 2251 Accesses. 6.6 Conclusions. Among machining processes such as turning, milling, drilling, and grinding, the latter started as a precision process, …

The truing system was composed of an ultra-precision grinding machine tool, a truing spindle, a tool spindle, an arc-shaped diamond grinding wheel, a GC rod and a coolant nozzle, etc. ... Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications ... PV-values of the S1 and S2 freeform …

Micro-tools comprising difficult-to-machine materials have seen widespread application in micro-manufacturing to satisfy the demands of micro-part processing and micro-device development. Taking micro …

3.1 Tool path generation methods. There are usually two methods commonly used for tool path generation in complex micro-nano structure surface machining [].Where, the constant arc-length method requires that each arc between every two adjacent cutting points must be a constant value ∆s.The cutting points are dense at the center and sparse …

Ultra-precision grinding is a common method to obtain high quality surfaces. It is widely used in the area of large wafer thinning and optical elements manufacturing. The working principle of ultra-precision grinding is removing the material by means of rotation motion and axial feed motion of the grinding wheel [ 13].

Micro-grinding is a tool based mechanical micromachining process which is mostly applied to create and finish 3D micro-features on hard and brittle materials such as glass, silicon, alumina, etc. Miniature-sized abrasive tool comes in physical contact with the workpiece and removes the unwanted material with mostly nanometric undeformed chip …

and abrasive machining, with the latter comprising precision grinding and polishing and the former being dominated by diamond turning and milling. In this chapter, most of ultra-precision machining methods will be introduced from three machining processes, ultra-precision cutting, ultra-precision grinding, and polishing/figuring.

Ultra-precision single point diamond turning technology has been widely adopted to machine high precision reflectors. Diamond turned surfaces have special micro-morphology, which affect reflecting ...

In this research, a chromatic confocal sensor was integrated into an ultra-precision machine tool to measure the machined components. Fig. 1 shows the structural configuration of the proposed OMM system. The machine tool is equipped with three linear hydrostatic axes (X-, Y- and Z-axis) and two rotational axes (B- and C-axis).

This collection aims at summarizing the frontier research on processing and surface integrity characterization of difficult-to-machine materials. The scope of this Special Issue includes but is not limited to: Precision machining technology of difficult-to-machine materials, such as grinding, polishing, lapping, cutting, etc.;

With the increase in demand for various types of small-aperture aspherical optical parts, the machining of a small tungsten carbide alloy mould with high accuracy is not only required, but essential. Ultra-precision grinding is generally used to process the small tungsten alloy aspheric mould, but there are some grinding marks and surface …

Dear Colleagues, Ultra-precision machining is a multi-disciplinary research area that is an important branch of manufacturing technology. It targets achieving ultra-precision form or surface roughness accuracy, forming the backbone and support of today's innovative technology industries in aerospace, semiconductors, optics, …

History. The history of ultraprecision machining is closely linked with the development of precision machines and the history of precision engineering at large (Evans 1989).The modern era of ultraprecision machining began in the 1960s, triggered by a growing need for high precision mechanical parts and aspherical optical elements, …